To obtain a surface form measuring method wherein a surface form in which restoration error is reduced can be measured in all parts of an object to be measured.
This is a surface form measuring method in which distance sensors 11-15 for measuring distances to a surface of an object 16 to be measured are arranged, and calculation is performed based on a distance traversed in which relative movement is performed to the object 16 and a distance to the surface of the object to measure the surface form of the object. An operation circuit 18 is provided with a process which calculates difference values based on distances which are measured simultaneously by the distance sensors 11-15, and a process wherein the difference values are transformed to frequency region by fast Fourier transformation, correction is performed by a scale factor which is defined for each frequency, and the value which is inversely transformed again is made a value representing the surface form at the distance traversed. Dummy data which are used for converting data numbers of the difference values at the fast Fourier transformation are converted to powers of 2 with DC component of 0.
JPS57154012 | NON-CONTACT MEASURING DEVICE |
JP2000301222 | SHAPE CONTROL DEVICE |
JP3794959 | Wear measurement of refractory lining of metallurgical container |
TANABIKI HIROSHI
MAEDA KOZO
HONDA AKIYOSHI
Hisao Kobayashi
Kiyoshi Yasushima
Noboru Omura
Takanashi Norio
Saburo Kimura
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