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Title:
SURFACE INSPECTION DEVICE
Document Type and Number:
Japanese Patent JP2008275424
Kind Code:
A
Abstract:

To provide a surface inspection device for stably inspecting minute surface flaws on an inspected surface without being affected by noise from a sound part.

An imaging device 3 receives reflected light of illumination light projected from a light source 2 onto a surface of a steel plate 1 to obtain an image signal on the surface of the steel plate. Spatial resolution of the imaging device 3 is caused to be 0.2 mm or less while the imaging device 3 is disposed on the same side as the light source 2 relative to the direction 1a of the normal to the steel plate 1 at a projecting position. An incidence angle of the illumination light from the light source 2 to the surface of the steel plate is set at an angle between 60 and 80 while a light receiving angle 1 of the imaging device 3 is set at an angle between 20 and .


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Inventors:
OKUNO MAKOTO
KAZAMA AKIRA
SAKAI JUN
GOTO SHINJI
Application Number:
JP2007118905A
Publication Date:
November 13, 2008
Filing Date:
April 27, 2007
Export Citation:
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Assignee:
JFE STEEL KK
International Classes:
G01N21/892; C23C2/00
Domestic Patent References:
JPH0431753A1992-02-03
JPS58204348A1983-11-29
JPH11183396A1999-07-09
JP2002005845A2002-01-09
JPH11277143A1999-10-12
JPH0989800A1997-04-04
JPH09152319A1997-06-10
Attorney, Agent or Firm:
Tetsuya Mori
Yoshiaki Naito
Cui Shu Tetsu



 
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