Title:
SYSTEM AND METHOD FOR IMPROVING CHARACTERISTIC OF POROUS THIN FILM BY CHARGING CAVITY
Document Type and Number:
Japanese Patent JP2004006785
Kind Code:
A
Abstract:
To provide a method for reducing porosity of a porous thin film.
The method comprises a step for combining a sol gel layer and a thin film layer with a sol gel/thin film layer by providing a substrate, applying the thin film on the substrate, charging at least some voids, cracks or other surface penetration defects existing in the thin film and curing the sol gel layer, thereby reducing effect of the surface penetrating defects in the substrate having the thin film.
Inventors:
ZESCH JAMES C
VLASSAK JOOST J
VLASSAK JOOST J
Application Number:
JP2003101082A
Publication Date:
January 08, 2004
Filing Date:
April 04, 2003
Export Citation:
Assignee:
XEROX CORP
International Classes:
G03F7/11; B32B3/06; B32B3/26; B32B9/00; G03F7/00; G03F7/38; H01L21/027; H01L21/60; (IPC1-7): H01L21/60; G03F7/11; G03F7/38; H01L21/027
Attorney, Agent or Firm:
Minoru Nakamura
Fumiaki Otsuka
Sadao Kumakura
Shishido Kaichi
Toshio Imajo
Nobuo Ogawa
Village shrine Atsuo
Takaki Nishijima
Atsushi Hakoda
Fumiaki Otsuka
Sadao Kumakura
Shishido Kaichi
Toshio Imajo
Nobuo Ogawa
Village shrine Atsuo
Takaki Nishijima
Atsushi Hakoda