Title:
CMP/洗浄システム用の化学剤およびスラリをユースポイント方式で配送、制御、混合するためのシステムならびに方法
Document Type and Number:
Japanese Patent JP4646517
Kind Code:
B2
Abstract:
A method of mixing two or more chemicals such as for a CMP system. The method includes delivering a first chemical to a first inlet port of a point of use mixer at a first flow rate, delivering a second chemical to a second inlet port of the point of use mixer at a second flow rate, controlling the flow of the first and second chemicals into the mixer upon demand for a mixture of the first and second chemicals and balancing the flow of the first and second chemicals into the mixer. The mixture can also be output such as to a CMP process. A system for mixing two or more chemicals is also described.
Inventors:
Pham Suen
Nguyen Tuan
Yuk Bien
Chow Len
Nguyen Tuan
Yuk Bien
Chow Len
Application Number:
JP2003570199A
Publication Date:
March 09, 2011
Filing Date:
December 23, 2002
Export Citation:
Assignee:
LAM RESEARCH CORPORATION
International Classes:
B24B57/02; H01L21/304; B24B37/00; G05D11/13
Domestic Patent References:
| JP2003282499A | ||||
| JP2002170792A | ||||
| JP6500621A | ||||
| JP11033471A | ||||
| JP11126764A | ||||
| JP11138438A | ||||
| JP2000071172A | ||||
| JP2000202774A |
Attorney, Agent or Firm:
Meisei International Patent Office