Title:
フローを分割するためのシステム及び方法
Document Type and Number:
Japanese Patent JP3926747
Kind Code:
B2
Abstract:
A system for dividing a single flow of gas into two or more secondary flows of known, precise values, without requiring a high upstream pressure. The system includes an inlet for receiving the single gas flow, and first and second flow lines connected to the inlet. A mass flow meter measures gas flow through the first line and provides a signal indicative of the measured flow rate. A restrictor restricts gas flow through the first line to a desired flow rate, and has a smallest cross-sectional flow area selected to provide an upstream pressure high enough to allow the mass flow meter to operate properly and lower than a predetermined upper pressure limit. A mass flow controller receives the signal indicative of the measured flow rate from the mass flow meter and maintains a flow rate through the second line based on the signal.
Inventors:
Taylor, Mathieu, Thomas
Harahan, John Christopher
Clark, William, Earl.
Harahan, John Christopher
Clark, William, Earl.
Application Number:
JP2002582301A
Publication Date:
June 06, 2007
Filing Date:
December 31, 2001
Export Citation:
Assignee:
MKS Instruments, Incorporated
International Classes:
G05D7/06; H01L21/02; G05D11/13
Domestic Patent References:
| JP10240352A | ||||
| JP58067856A | ||||
| JP58151614A | ||||
| JP48014986A | ||||
| JP11212653A | ||||
| JP8335117A |
Attorney, Agent or Firm:
Masao Okabe
Nobuaki Kato
Kazuo
Shinichi Usui
Ikuo Fujino
Takao Ochi
Teruhisa Motomiya
Norimichi Takanashi
Asahi Shinmitsu
Seiichiro Takahashi
Koji Yoshizawa
Takao Matsui
Nobuaki Kato
Kazuo
Shinichi Usui
Ikuo Fujino
Takao Ochi
Teruhisa Motomiya
Norimichi Takanashi
Asahi Shinmitsu
Seiichiro Takahashi
Koji Yoshizawa
Takao Matsui