Title:
VACUUM CLEAN BOX AND CLEAN TRANSFER METHOD AND DEVICE
Document Type and Number:
Japanese Patent JP3184479
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To transfer an object to be carried in vacuum sealed state using a side surface opening type vacuum clean box with a simple structure where the need for a mechanical seal is eliminated.
SOLUTION: A vacuum clean box 30 with a box body 31 having a side surface opening 32 and a small hole 33 for suction and exhaust, a side lid 34 for closing a side surface opening 32 due to the pressure difference between inside and outside, and an addition lid 35 for closing the small hole 33 for suction and exhaust similarly is used, thus connecting the vacuum clean box 30 to a gate port 42 of a clean room 40, evacuating a closed space at the box body outer side including the addition lid 35 by a vacuum changer 50, eliminating the pressure difference between the inside and outside of the addition lid 35, and then opening the small hole 33 for suction and exhaust, setting the inside of the vacuum clean box 30 to atmospheric pressure through the small hole 33 for suction and exhaust, and sucking the side lid 34 into the clean room 40 and communicating the space inside the vacuum clean box and the inside of the clean room 40 for carrying an object to be carried.
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Inventors:
Toshihiko Miyajima
Application Number:
JP14720497A
Publication Date:
July 09, 2001
Filing Date:
May 21, 1997
Export Citation:
Assignee:
TDK Co., Ltd.
International Classes:
B65D85/86; B65G49/00; H01L21/673; H01L21/677; H01L21/68; (IPC1-7): H01L21/68
Domestic Patent References:
| JP637174A |
Attorney, Agent or Firm:
Takashi Murai