To provide a table for vacuum application guided by a means of aerostatics bearing element.
The table is provided with a fixedly mounted supporting structure and a table top. The table top is displaceable in the x-direction and y-direction with respect to the fixedly mounted supporting structure by means of slides. The slides are provided with the aerostatics bearing elements for guiding. These aerostatics bearing elements are connected to feed lines for supplying gas required for operation of the gas bearings and suction lines for removing the gas. The suction lines comprise at least one variable-length line arrangement having a first pipe member and a second pipe member which penetrate one inside the other without contacting. At least one sealing gap is provided between the pipe members.
JACKEL CHRISTIAN
KIRSCHSTEIN ULF-CARSTEN
BOEHM MICHAEL
BAUER RENE
HARNISCH GERD
PESCHEL THOMAS
RISSE STEFAN
SCHENK CHRISTOPH
| JP2002257138A | 2002-09-11 | |||
| JP2002237449A | 2002-08-23 | |||
| JP2007042924A | 2007-02-15 | |||
| JP2000321783A | 2000-11-24 |
| WO2005122242A1 | 2005-12-22 |
Hideki Imai