TEMPERATURE CONTROL METHOD OF ELECTRIC FURNACE

Japanese Patent JPH09260294

A

To quickly and stably maintain the temperature in an electric furnace at a target temperature when a substrate is introduced in the electric furnace.

This temperature control method of an electric furnace makes a first adjusting equipment 12 and a second adjusting equipment 13 control a heater 7 according to a target temperature inputted from a target temperature setting equipment 9, and heats an electric furnace 1. When a substrate (w) a introduced, a temperature correcting equipment 11 obtains a time variation pattern of temperature difference between the temperature in the electric furnace 1 and the set target temperature. In the case that substrates (w) are introduced in succession, the temperature correcting equipment 11 adds the time variation pattern of temperature difference to a target temperature pattern. The first and the second adjusting equipments 12, 13 control the heater 7, according to the corrected target temperature pattern, and heat the electric furnace 1. As a result, the change of temperature in the electric furnace 1 which is generated at the time of introducing the substrate (w) can be restrained, and the temperature in the electric furnace 1 is quickly and stably maintained at a set target temperature.

JP3478616

PRODUCTION OF QUARTZ GLASS BLOCK COMPOSITE

UENO MASAAKI
NAKANO MINORU
TANAKA KAZUO
AKITA YUKIO

JP9064096A

October 03, 1997

March 19, 1996

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KOKUSAI ELECTRIC CO LTD

H01L21/22; G05D23/19; H01L21/205; H01L21/31; H01L21/324; (IPC1-7): H01L21/22; G05D23/19; H01L21/205; H01L21/22; H01L21/31; H01L21/324

Tatsuo Moriyama

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