Title:
TEMPERATURE MEASUREMENT RESISTOR FILM
Document Type and Number:
Japanese Patent JP2004311743
Kind Code:
A
Abstract:
To provide a temperature measurement resistor film wherein the resistance value of a resistor is hard to change even if it is exposed at a high temperature.
The temperature measurement resistor film is provided with a first layer as a resistor film made of Ti or NiCr with a geometric thickness of 1-1,000 nm, and a second layer as a protective layer made of SiN or SiO2 with a geometric thickness of 1-1,000 nm.
Inventors:
KANAI TOSHIMASA
ISHIHARA UKON
TAMIYA MITSUKO
ISHIHARA UKON
TAMIYA MITSUKO
Application Number:
JP2003103795A
Publication Date:
November 04, 2004
Filing Date:
April 08, 2003
Export Citation:
Assignee:
NIPPON ELECTRIC GLASS CO
International Classes:
G01K7/18; H01C7/02; (IPC1-7): H01C7/02; G01K7/18
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