Title:
THERMAL TREATMENT DEVICE
Document Type and Number:
Japanese Patent JP2021197448
Kind Code:
A
Abstract:
To suppress heat dissipation from an opening on the bottom side of a container, reduce heat bias in the horizontal direction in a bottom zone, and reduce the manufacturing cost and operating cost in a vertical thermal treatment device.SOLUTION: A thermal treatment device 1 includes a vertical tube 3 having an opening 34 at the lower end for taking in and out an object 100 to be processed, a heater 22 placed around the tube 3, a rack 43 having a configuration in which a plurality of support portions 51 for supporting the object to be processed 100 are provided vertically separated from each other and holding the plurality of objects to be processed 100 in the tube 3, and a heat ray reflecting member 5 for reflecting the heat ray from the heater 22 to the object to be processed 100 supported by the rack 43, which is arranged below the lowermost object to be processed 100 in the vertical direction.SELECTED DRAWING: Figure 1
Inventors:
ONODERA KATSUYA
KASATSUGU KATSUNAO
NISHIOKA MASAHIRO
AOYAGI KEITA
KASATSUGU KATSUNAO
NISHIOKA MASAHIRO
AOYAGI KEITA
Application Number:
JP2020102879A
Publication Date:
December 27, 2021
Filing Date:
June 15, 2020
Export Citation:
Assignee:
KOYO THERMO SYS KK
International Classes:
H01L21/22; F27B17/00; F27D11/02; H01L21/324
Attorney, Agent or Firm:
Patents corporation Blitas
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