Title:
ウエブの熱処理装置
Document Type and Number:
Japanese Patent JP5323343
Kind Code:
B2
Inventors:
Katsuhiro Omori
Shigeyoshi Kobayashi
Takeshi Hiasa
Mitsutaka Murata
Shigeyoshi Kobayashi
Takeshi Hiasa
Mitsutaka Murata
Application Number:
JP2007320461A
Publication Date:
October 23, 2013
Filing Date:
December 12, 2007
Export Citation:
Assignee:
Hirano Tech Seed Co., Ltd.
International Classes:
F26B13/20; D06C7/00; D21F5/18; F26B13/10; F26B21/00
Domestic Patent References:
| JP5008372A | ||||
| JP2004066042A | ||||
| JP11128807A | ||||
| JP11254642A | ||||
| JP20014274A |
Attorney, Agent or Firm:
Masato Tsuda
Tetsuji Nakamura
Katsuyuki Tomita
Tamako Tsutada
Tetsuji Nakamura
Katsuyuki Tomita
Tamako Tsutada