Title:
THIN FILM BULK WAVE ACOUSTIC RESONATOR
Document Type and Number:
Japanese Patent JP2006319796
Kind Code:
A
Abstract:
To provide a thin film bulk wave acoustic resonator suppressing spurious.
The thin film bulk wave acoustic resonator has: a first electrode 12; a piezoelectric film 14 provided on the first electrode 12; a second electrode 18 opposite to the first electrode 12 on both side of the piezoelectric film 14; and an additional film 16 provided so as to be opposite to the first electrode 12 on both sides of the piezoelectric film 14 and having at least a set of opposite sides which are not in parallel.
Inventors:
EBUCHI YASUO
Application Number:
JP2005141713A
Publication Date:
November 24, 2006
Filing Date:
May 13, 2005
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
H03H9/17; H01L41/09; H01L41/18; H01L41/187; H01L41/22; H01L41/253; H03H9/54
Domestic Patent References:
| JP2000031552A | 2000-01-28 | |||
| JP2000332568A | 2000-11-30 |
Foreign References:
| WO2005043756A1 | 2005-05-12 |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Iwa Saki Kokuni
Kawamata Sumio
Nakamura Tomoyuki
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu
Iwa Saki Kokuni
Kawamata Sumio
Nakamura Tomoyuki
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu
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