Title:
薄膜の作製方法及び作製装置
Document Type and Number:
Japanese Patent JP5679689
Kind Code:
B2
Abstract:
Disclosed is a method for manufacturing a thin film having a high film density using a spray film-forming method. The method for manufacturing a thin film sequentially includes: step of forming liquid droplets by spraying a raw material liquid, which has a solute dissolved and/or diffused in a solvent; a step of volatilizing and condensing the solvent in the liquid droplets; and a step of depositing the condensed liquid droplets on a substrate or on a thin film provided on the substrate. The method is characterized in depositing, at the same time on the substrate, the liquid droplets having liquid droplet diameters different from each other.
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Inventors:
沖 和宏
安藤 広敏
安藤 広敏
Application Number:
JP2010089319A
Publication Date:
March 04, 2015
Filing Date:
April 08, 2010
Export Citation:
Assignee:
富士フイルム株式会社
International Classes:
B05D1/02; B05B7/02; B05D1/36; H01L51/48; H01L51/50; H05B33/10
Attorney, Agent or Firm:
Patent business corporation patent firm Sykes
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