Title:
THIN-FILM TRANSISTOR SUBSTRATE AND PRODUCTION THEREOF AND LIQUID CRYSTAL DISPLAY PANEL AND LIQUID CRYSTAL DISPLAY DEVICE
Document Type and Number:
Japanese Patent JPH05173177
Kind Code:
A
Abstract:
PURPOSE:To prevent the shorting of gate electrodes and source and drain electrodes by specifying the angle of inclination of the end faces of the gate electrodes to a substrate. CONSTITUTION:A 2nd conductive film g2 consisting of aluminum is provided by sputtering and thereafter, a resist RST is provided. The 2nd conductive film g2 is then selectively etched to form scanning signal lines, gate electrodes GT, etc. Gaseous SF6 is then introduced into a dry etching device and the resist RST is removed. Further, the film g2 is anodized to provide the scanning signal lines, gate electrodes GT, and anodized films AOF after the resist for anodic oxidation is provided. Since the angle of inclination of the end faces of the film g2 is confined to <=50 deg., the angle of inclination of the end faces of the electrodes GT attains <=50 deg. and, therefore, electric fields do not concentrate to the ends of the electrodes GT and since the stress concn. does not arise in the angle of the films AOF at the time of anodic oxidation and, therefore, the corner parts of the films AOF do not crack.
Inventors:
YAMAMOTO HIDEAKI
MATSUMARU HARUO
NAKATANI MITSUO
MATSUMARU HARUO
NAKATANI MITSUO
Application Number:
JP34286991A
Publication Date:
July 13, 1993
Filing Date:
December 25, 1991
Export Citation:
Assignee:
HITACHI LTD
International Classes:
G02F1/1343; G02F1/136; G02F1/1368; (IPC1-7): G02F1/1343; G02F1/136
Attorney, Agent or Firm:
Junnosuke Nakamura (1 outside)