Title:
【発明の名称】電子ビーム励起プラズマ発生装置
Document Type and Number:
Japanese Patent JP2868120
Kind Code:
B2
Abstract:
The present invention provides an electron-beam excited plasma generator which can effectively form samples of larger areas. The electron-beam excited plasma generator according to the present invention comprises a cathode (11) for emitting thermions; a discharge electrode (23) for gas discharge between the cathode and the same; an intermediate electrode (13) positioned coaxially with the discharge electrode in an axial direction; a discharge chamber (2) to be filled with discharge gas plasma generated by the gas discharge between the cathode and the discharge electrode; a plasma processing chamber (3) formed adjacent to the discharge chamber with a partition wall (21) disposed therebetween and positioned so that a surface-to-be-processed of a workpiece-to-be-processed (35) is positioned perpendicular to the axial direction; a plurality of orifices (22) for pulling out electrons in the discharge gas plasma in the discharge chamber into the plasma processing chamber, each being formed in the partition wall substantially perpendicular to the axial line and distributed radially with respect to the axial direction; and an accleerating electrode (31) disposed in the plasma processing chamber for pulling out and accelerating the electrons through the orifices.
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Inventors:
RYUJI MAKOTO
TOKAI MASAKUNI
MORI YUKITAKA
HASEGAWA TAKESHI
BAN MASAHITO
TOKAI MASAKUNI
MORI YUKITAKA
HASEGAWA TAKESHI
BAN MASAHITO
Application Number:
JP9852798A
Publication Date:
March 10, 1999
Filing Date:
March 26, 1998
Export Citation:
Assignee:
KAWASAKI JUKOGYO KK
International Classes:
H05H1/46; C23C14/32; C23F4/00; H01J27/20; H01J37/32; H01L21/203; H01L21/205; H01L21/302; H05H1/24; (IPC1-7): H05H1/24; C23C14/32; C23F4/00; H01L21/205; H01L21/302
Domestic Patent References:
| JP9106969A | ||||
| JP7142020A | ||||
| JP6338481A |
Attorney, Agent or Firm:
Seki Seiji