Title:
P-HYDROXYSTYRENE-ALPHA-METHYLSTYRENE BLOCK COPOLYMER PARTIALLY ESTERIFIED WITH T-BUTOXYCARBONYL GROUP AND ITS PRODUCTION
Document Type and Number:
Japanese Patent JPH0632849
Kind Code:
A
Abstract:
PURPOSE: To obtain the subject copolymer having a narrow mol.wt. distribution, capable of being developed with an alkali, having a high developing property and a high resolving property, and useful for resist materials, etc., by t- butoxycarbonylating the hydroxyl groups of the polyhydroxystyrene parts in a specific copolymer.
CONSTITUTION: The hydroxyl groups of the poly p-hydroxystyrene parts in a singly dispersible p-hydroxystyrene-α-methylstyrene block copolymer having a weight-average mol.wt. (Mw)/number-average mol.wt. (Mn) of 1.01-1.5 are partially t-butoxycarbonylated to provide the objective copolymer having repeating units of formulas I, II and III.
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Inventors:
WATANABE OSAMU
YAMADA MOTOYUKI
YAGIHASHI FUJIO
YAMADA MOTOYUKI
YAGIHASHI FUJIO
Application Number:
JP21467392A
Publication Date:
February 08, 1994
Filing Date:
July 20, 1992
Export Citation:
Assignee:
SHINETSU CHEMICAL CO
International Classes:
C08F8/14; C08F297/02; (IPC1-7): C08F297/02; C08F8/14
Attorney, Agent or Firm:
Takashi Kojima