Title:
【発明の名称】フォトレジスト現像装置
Document Type and Number:
Japanese Patent JP2891951
Kind Code:
B2
Inventors:
ARAKI SHINJI
Application Number:
JP32693096A
Publication Date:
May 17, 1999
Filing Date:
December 06, 1996
Export Citation:
Assignee:
KAGOSHIMA NIPPON DENKI KK
International Classes:
H01L21/027; H01L21/304; (IPC1-7): H01L21/027
Domestic Patent References:
| JP5185012A |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)