Title:
【発明の名称】処理装置
Document Type and Number:
Japanese Patent JP2811247
Kind Code:
B2
Abstract:
PURPOSE:To realize even sticking of treating liquid to a body to be treated and also to prevent contamination of it by removing the treating liquid, when waiting, remaining at a treating liquid supply nozzle not in use. CONSTITUTION:A waiting means 23 which holds a treating liquid supply nozzle 21 when not in use is provided with a nozzle holder 31 which holds a nozzle opening 22 of the treating liquid supply nozzle 21 at a opening part 32 and a treating liquid removing member 35 which is provided on the opening part side of the nozzle holder 31. The treating liquid removing member 35 is near the nozzle opening 22 of the treating liquid supply nozzle 21 which is waiting and removes the treating liquid remaining at the nozzle opening 22. By this, treating liquid evenly sticks to a body to be treated, for preventing contamination of the body.
Inventors:
Kimura Yoshio
Application Number:
JP35119191A
Publication Date:
October 15, 1998
Filing Date:
December 13, 1991
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
B05B15/02; B08B3/02; H01L21/027; H01L21/30; H01L21/304; H01L21/31; (IPC1-7): H01L21/027; B05B15/02
Domestic Patent References:
| JP430521A | ||||
| JP63240966A | ||||
| JP62193251A | ||||
| JP60117734A |
Attorney, Agent or Firm:
Kikuhiko Nakamoto