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Title:
【発明の名称】半導体装置
Document Type and Number:
Japanese Patent JP3321899
Kind Code:
B2
Abstract:
A semiconductor device of an SOIMOSFET comprising a semiconductor substrate, an insulating layer and a thin film single-crystalline semiconductor layer, the insulating layer containing a floating electrically conductive layer buried therein at a portion corresponding to the channel, the floating electrically conductive layer being electrically insulated from the other portions, the semiconductor device further comprising an electrode adjacent to the floating electrically conductive layer for applying a voltage by which an electric charge is injected into and stored in the floating electroconductive layer.

Inventors:
Kazuhiro Tsuruta
Akiyoshi Asai
Seiji Fujino
Hiroaki Himi
Application Number:
JP13186493A
Publication Date:
September 09, 2002
Filing Date:
June 02, 1993
Export Citation:
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Assignee:
株式会社デンソー
International Classes:
H01L27/04; H01L21/336; H01L21/822; H01L21/84; H01L27/08; H01L29/78; H01L29/786; H01L29/788; (IPC1-7): H01L29/786
Domestic Patent References:
JP6163895A
Attorney, Agent or Firm:
Hirohiko Usui