PURPOSE: To provide a confocal laser scanning differential interference microscope capable of quantitatively measuring the level difference of a specimen in terms of height.
CONSTITUTION: The specimen 7 is irradiated by 1st, 2nd and 3rd light spots 8, 9 and 10 arranged in order, and even and odd modes are excited in a double mode waveguide from the reflected light beam of the 2nd light spot 9 among three light spots 8, 9 and 10. By using the interference of the even and odd modes, the differential information of an area irradiated by the 2nd light spot 9 on the specimen is obtained. The reflected light beams of the 1st and the 3rd light spots 8 and 10 among three light spots 8, 9 and 10 are made to interfere to obtain a phase difference, so that a height difference between the areas of the specimen irradiated by the 1st and the 3rd light spots 8 and 10 is obtained.
IWASAKI JUN
OKI YASUSHI
