Title:
FILM FORMING METHOD
Document Type and Number:
Japanese Patent JPS5815229
Kind Code:
A
Abstract:
PURPOSE:To uniformalize supply of reaction gas, thickness of the formed film as well as quality by a method wherein a plate-like, tubular-like flow distributor is disposed in only front or both front and rear of the parallel discharge electrodes. CONSTITUTION:In front of a pair of parallel discharge electrodes comprising a cathode 2 and an anode 3 between which reaction gas G passes, there is provided a flow distributor 6 having a plurality of through holes 5, so that the reaction gas G is supplied between the pair of parallel discharge electrodes after having passed the through holes 5 in the flow distributor 6. By so ding, the reaction gas G is reluctant to undergo turbulance and is always supplied in the uniform flow. This results in constant reaction at all times and the film produced through the reaction is made uniform in its thickness.
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Inventors:
KAGEYAMA YOSHIYUKI
AKEYOSHI HIDEKI
AKEYOSHI HIDEKI
Application Number:
JP11300381A
Publication Date:
January 28, 1983
Filing Date:
July 21, 1981
Export Citation:
Assignee:
RICOH KK
International Classes:
H01L31/0248; C23C16/509; H01L21/205; H01L21/31; (IPC1-7): H01L21/205; H01L21/31; H01L31/04
Attorney, Agent or Firm:
Hidetake Komatsu