PURPOSE: To form the film of superfine particles having predetermined shape and thickness on the surface of a base, by mixing said superfine particles in carrier gas, ejecting it through a nozzle having a small opening, and spraying it onto the surface of the base.

CONSTITUTION: A proper amount of superfine particles (a) having a particle size of about 0.1W0.01μ, e.g. metal, is received in a vessel 1, and gas, e.g. inert gas such as Ar or He, is injected therein as carrier gas to maintain the superfine particles (a) under a fluidized condition with the gas (b) inside the vessel 1. Then, the mixture is ejected through a carrier pipe 4 and the top end of a nozzle 6 having a small opening and sprayed onto the surface of the base 7 of a substrate. Hence, the superfine particles (a) are pushed onto the surface of the base 7 and adhesively accumulated thereon to form a dense film B. Thus, the film composed of the superfine particles only having large strength is easily manufactured.