METHOD OF FORMING RESIST PATTERN - HITACHI CHEMICAL CO LTD

Title:

METHOD OF FORMING RESIST PATTERN

Document Type and Number:

Japanese Patent JPS612383

Kind Code:

A

Inventors:

IWASAKI YORIO
FUKUTOMI NAOKI
KIDA AKINARI
KOJIMA FUJIO
KAWASHIMA YUTAKA

Application Number:

JP12284584A

Publication Date:

January 08, 1986

Filing Date:

June 14, 1984

Export Citation:

Assignee:

HITACHI CHEMICAL CO LTD

International Classes:

H05K3/06; H05K3/18; (IPC1-7): H05K3/06; H05K3/18

Attorney, Agent or Firm:

Kunihiko Wakabayashi

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