Title:
LIQUID PHASE EPITAXIAL GROWING METHOD AND BOAT FOR GROWTH
Document Type and Number:
Japanese Patent JPS5826099
Kind Code:
A
Abstract:
PURPOSE:To enhance the productivity of a growing method by forming the soln. sliding surface of a substrate supporting table with a detachable inserted plate and by carrying out liq. phase epitaxial growth while cleaning a contaminated inserted plate in a groove cut in a soln. holding table. CONSTITUTION:The surface of the substrate supporting table 1 of a carbon boat for growth contacting with a soln. is formed with a detachable inserted plate 11 made of carbon, and the upper surface of the plate 11 is allowed to coincide with the upper surface of the table 1. A groove 12 is cut in the soln. holding table 3 having a plurality of soln. reserving chambers 4, 4..., and a contaminated inserted plate 11 is put in the groove 12 and cleaned by contact with a soln. contg. the same components as a soln. for epitaxial growth, a soln. contg. one of the components, or a soln. exerting no influence on an epitaxially grown layer. The plate 11 is cleaned while carrying out liq. phase epitaxial growth using said boat.
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Inventors:
NAKAJIMA KAZUO
Application Number:
JP12451481A
Publication Date:
February 16, 1983
Filing Date:
August 08, 1981
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
C30B19/00; C30B19/06; H01L21/208; (IPC1-7): C30B19/00; H01L21/02
Attorney, Agent or Firm:
Koshiro Matsuoka