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Title:
TRANSFER APPARATUS AND TRANSFER METHOD
Document Type and Number:
Japanese Patent JP2009208316
Kind Code:
A
Abstract:

To provide a transfer apparatus which transfers a microscopic transfer pattern formed in a mold to a to-be-molded article in an accurate posture by adjusting the rotation alignment of the mold with respect to the article.

The transfer apparatus 1 includes an object holder 5 holding a to-be-molded article W and a mold holder 9 which moves relatively in such a direction as to access or leave the object holder 5 while holding the mold M or positions freely the rotating position, relative to the object holder 5, around the shaft CL1 extending in the moving direction.


Inventors:
FUJIWARA SHIGERU
ASANOME YUTAKA
BABA TAKATO
KANEMOTO MASAKAZU
Application Number:
JP2008052606A
Publication Date:
September 17, 2009
Filing Date:
March 03, 2008
Export Citation:
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Assignee:
TOSHIBA MACHINE CO LTD
International Classes:
B29C59/02; G11B5/84; G11B7/26; H01L21/027
Domestic Patent References:
JP2005353858A2005-12-22
JP2007296783A2007-11-15
JP2006297716A2006-11-02
JP2007140460A2007-06-07
JP2007137051A2007-06-07
JP2006326927A2006-12-07
JP2007305647A2007-11-22
JP2007250767A2007-09-27
JP2006202920A2006-08-03
JP2005353858A2005-12-22
JP2007296783A2007-11-15
JP2006297716A2006-11-02
JP2007140460A2007-06-07
JP2007137051A2007-06-07
JP2006326927A2006-12-07
Attorney, Agent or Firm:
Hidekazu Miyoshi
Iwa Saki Kokuni
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu



 
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