Title:
搬送用治具及び交換方法
Document Type and Number:
Japanese Patent JP7165510
Kind Code:
B2
Abstract:
A transfer jig for use in transferring a new cutting blade as a replacement component to the processing unit, in a cutting apparatus including a chuck table holding a workpiece, a processing unit having a spindle and a cutting blade detachably mounted on the spindle, a cutting blade changing unit changing the cutting blade, and a transfer mechanism supplying the workpiece to the processing unit. The transfer jig has a plurality of receiving portions each adapted to receive the new cutting blade and the cutting blade changed by the cutting blade changing unit. The transfer jig is adapted to be transferred by the transfer mechanism transferring the workpiece.
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Inventors:
Kazuki Terada
Application Number:
JP2018100900A
Publication Date:
November 04, 2022
Filing Date:
May 25, 2018
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; B24B27/06; B24B45/00
Domestic Patent References:
| JP2007229843A | ||||
| JP2017098540A |
Attorney, Agent or Firm:
Sakai International Patent Office