Title:
TRANSMISSION TYPE OPTICAL DEVICE, MANUFACTURING METHOD FOR THE SAME, AND PROJECTION ALIGNER
Document Type and Number:
Japanese Patent JP2005099707
Kind Code:
A
Abstract:
To provide a manufacturing method for a transmission type optical device equipped with an antireflection layer having wear resistance and also capable of coping with high NA.
The etching of an optical member OW by the ion GI of reaction gas progresses with sputtered particles SP as a mask, and innumerable cone-shaped projections CP are formed corresponding to the positions of the sputtered particles SP. Since fine needle-state structure composed of such projections CP forms the antireflection layer AR in macroscopic sense, the optical member OW having the antireflection layer AR, that is, the optical device is manufactured.
Inventors:
HAMAMURA HIROSHI
HIRAMATSU KAZUMASA
MIYAKE HIDETO
YAMAJI HIRONORI
HIRAMATSU KAZUMASA
MIYAKE HIDETO
YAMAJI HIRONORI
Application Number:
JP2004165868A
Publication Date:
April 14, 2005
Filing Date:
June 03, 2004
Export Citation:
Assignee:
NIKON CORP
International Classes:
G03F7/20; G02B1/11; H01L21/027; (IPC1-7): G02B1/11; G03F7/20; H01L21/027
Domestic Patent References:
| JP2000258607A | 2000-09-22 | |||
| JP2003066211A | 2003-03-05 | |||
| JP2000261008A | 2000-09-22 | |||
| JPH03266460A | 1991-11-27 | |||
| JPH07295203A | 1995-11-10 | |||
| JP2000131824A | 2000-05-12 | |||
| JPH11245266A | 1999-09-14 | |||
| JP2002296403A | 2002-10-09 | |||
| JPH11154458A | 1999-06-08 |
Attorney, Agent or Firm:
Mitsuhiro Fukuda
Yoshihiro Fujimoto
Yoshihiro Fujimoto