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Title:
TRAVELING VEHICLE SYSTEM
Document Type and Number:
Japanese Patent JP2010235214
Kind Code:
A
Abstract:

To provide a traveling vehicle system capable of attaining enhancement of conveying efficiency of an automated guided truck and space-saving of a facility.

The traveling vehicle system includes: a substrate treatment devices R1, R2 applying storage of the substrate or predetermined treatment; the automated guided truck AG conveying the substrate G along a track LA provided toward the substrate treatment devices R1, R2 in the state that the substrate G is stored in a substrate cassette 1; and a substrate cassette exchanging device CG having a lifting part K1 for retaining the substrate cassette 1 conveyed from the automated guided truck AG and lifting it in a vertical direction, a sheet conveying part 15 for sheet-conveying the substrate between the substrate cassette 1 and the substrate treatment devices R1, R2 at a lower side of the lifting part K1 and a substrate cassette retaining part K2 for retaining the substrate cassette 1 at an upper side of the lifting part K1.


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Inventors:
ISHIBASHI KIEN
MURAYAMA SUSUMU
WADA YOSHIYUKI
ONO TOSHITAKA
Application Number:
JP2009081867A
Publication Date:
October 21, 2010
Filing Date:
March 30, 2009
Export Citation:
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Assignee:
IHI CORP
International Classes:
B65G1/00; B65G49/06; H01L21/677
Domestic Patent References:
JPS62130906A1987-06-13
JP2008242494A2008-10-09
JPS59108624A1984-06-23
JP2004284772A2004-10-14
JP2005175429A2005-06-30
JP2001354302A2001-12-25
JP2009038326A2009-02-19
JP2006032808A2006-02-02
JPS62130906A1987-06-13
JP2008242494A2008-10-09
JPS59108624A1984-06-23
JP2004284772A2004-10-14
JP2005175429A2005-06-30
JP2001354302A2001-12-25
JP2009038326A2009-02-19
JP2006032808A2006-02-02
Attorney, Agent or Firm:
Masatake Shiga
Takashi Watanabe



 
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