Title:
TREATING DEVICE AND STAGE DEVICE
Document Type and Number:
Japanese Patent JP3636864
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To prevent the displacement of a body to be treated on a laying table at the time of pressure variation in a treating chamber.
SOLUTION: On the outer peripheral part of the laying table 5, guide holes 42 for guiding by inserting through lift pins 6 are formed, and on the surface of the laying table 5, recessed grooves 43 are formed radially from the center so as to be communicated with the guide holes 42. At the time of reducing the pressure, even if a minute quantity of gas remaining in a gap between a wafer W and the laying table 5 expands, this expanded gas is discharged to the rear surface of the laying table 5 through the recessed grooves 43 and the guide holes 42.
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Inventors:
Sumi Tanaka
Nakajima Nobutaka
Koizumi Masato
Nakajima Nobutaka
Koizumi Masato
Application Number:
JP16788697A
Publication Date:
April 06, 2005
Filing Date:
June 11, 1997
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
C23C16/44; C23C16/458; H01L21/205; H01L21/687; (IPC1-7): C23C16/458; H01L21/205
Domestic Patent References:
| JP8246154A | ||||
| JP7507844A | ||||
| JP3038357U |
Attorney, Agent or Firm:
Hiroshi Takayama