Title:
TREATING METHOD FOR POLY(ALICYCLIC OLEFIN) COMPOSITION, SEMICONDUCTOR DEVICE, OPTICAL COMPONENT, AND ORGANIC ELECTROLUMINESCENT DEVICE
Document Type and Number:
Japanese Patent JP2004002752
Kind Code:
A
Abstract:
To provide a resin which has low permittivity and low refractive index and is useful as an insulation material, an optical component material, and an organic electroluminescent element material.
A poly(alicyclic olefin) composition containing structural units represented by formula (1) and/or a precursor of structural units represented by formula (1) is heated at 200°C or higher in an atmosphere with an oxygen concentration of 1,000 ppm or lower. In formula (1), l is 1-2; m, n, and o are each an integer of 0-5 provided that m+n≥1; X is a direct bond, O, S, CH2, CO, SO, or SO2; R1 to R4 are each F, CF3, a 1-10C alkyl, or a 6-20C aryl; R5 and R6 are each H or a 1-10C alkyl; and R7 and R8 are each F, CF3, OCF3, a 1-10C alkyl, or a 6-20C aryl.
Inventors:
OKUDA RYOJI
FUJIWARA TAKENORI
SUGIMOTO KAZUNORI
OTAKE ATSUYUKI
FUJIWARA TAKENORI
SUGIMOTO KAZUNORI
OTAKE ATSUYUKI
Application Number:
JP2003084684A
Publication Date:
January 08, 2004
Filing Date:
March 26, 2003
Export Citation:
Assignee:
TORAY INDUSTRIES
International Classes:
C08F8/48; C08F32/06; H01L21/312; H01L21/768; H01L23/522; H01L29/786; (IPC1-7): C08F8/48; C08F32/06; H01L21/312; H01L21/768; H01L29/786