TREATING SOLUTION FEEDER

Title:

TREATING SOLUTION FEEDER

Document Type and Number:

Japanese Patent JP2003053214

Kind Code:

A

Abstract:

To provide a treating solution feeder improved in the function of preventing the solution from sagging.

In a treating solution feeder (1) having treating solution feed pipes (10 and 12) having downward outlet openings (2 and 4) for feeding a treating solution; feed pipe opening and closing means (14 and 16) that opens and closes the pipes (10 and 12) upstream of the pipes (2 and 4), the perimeters of the openings (2 and 4) have each a length enough to hold the treating solution between the means (14 and 16) and the openings (2 and 4) by surface tension.

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Inventors:

TAIMA YASUO
HARANO RIICHIRO
YOSHINO KIYOHIRO
WATARI TORU

Application Number:

JP2001252396A

Publication Date:

February 25, 2003

Filing Date:

August 23, 2001

Export Citation:

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Assignee:

SUPURAUTO KK

International Classes:

B05B1/04; B05B1/14; B05C5/00; B05C11/08; H01L21/304; (IPC1-7): B05B1/04; B05B1/14; B05C5/00

Attorney, Agent or Firm:

Minoru Nakamura (10 outside)

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