Title:
TUNING FORK VIBRATION GYRO AND METHOD FOR TRIMMING ELECTRODE
Document Type and Number:
Japanese Patent JP3778809
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a tuning fork vibration gyro, capable of providing a detection output of high S/N ratio by suppressing pyroelectric noise caused by temperature variations, and a method for trimming its electrodes.
SOLUTION: This tuning fork vibration gyro has a tuning fork vibration body. The vibration body comprises two or more parallel arms and a base for supporting the two or more arms in common, and has Z axis in the longitudinal direction of the two or more arms and X axis in a direction normal to this. The vibration body is integrally formed of a ferroelectric substance, and has drive electrodes for causing the two or more arms to generate vibrations parallel to the X axis, detection electrodes for detecting the electromotive forces generated, when the vibration body is rotated the Z axis, and dummy electrodes formed on surfaces of the two or more arms. Since the dummy electrodes on the surfaces of the arms equalize the potentials on the surfaces of the ferroelectric substance, thereby eliminating high potential portions, dielectric breakdown on surfaces of the ferroelectric substance can be suppressed, even if electric charges on the surfaces of the ferroelectric substance become excessive due to temperature variations.
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Inventors:
Kazuhiro Ota
Masaki Taniuchi
Yoshitaka Takahashi
Kikuchi
Keiji Saito
Masaki Taniuchi
Yoshitaka Takahashi
Kikuchi
Keiji Saito
Application Number:
JP2001116056A
Publication Date:
May 24, 2006
Filing Date:
April 13, 2001
Export Citation:
Assignee:
Fujitsu Media Device Limited
International Classes:
G01C19/56; G01C19/5607; G01P1/04; G01P21/00; H01L41/09; (IPC1-7): G01C19/56; G01P9/04; H01L41/09
Domestic Patent References:
| JP10288526A | ||||
| JP10073437A | ||||
| JP10038580A |
Attorney, Agent or Firm:
Hayashi Tsunetoku
Kenji Doi
Kenji Doi