PURPOSE: To remove a defect not to be avoided at the time of supporting a substrate carrier related to a vacuum covering device having the rotary driving type substrate carrier.

CONSTITUTION: A vacuum covering device has the rotary driving type substrate carrier, and its supporting means is constituted as a quasistatic pressure rotary driving means 4. A holding device 16 for incorporating parts to be covered is arranged and connected with a driving shaft 5 so as to be worked. The driving shaft 5 has a supporting disk 15 and supported in static pressure during operation. The supporting disk 15 is supported on both sides through at least one piece of ring passages 27, 28. The driving shaft 5 is guided in the radial direction in the wall 3 of the vacuum covering device and the ring passages 27, 28 are arranged in casings 25, 26 supported with a spring 39. The supporting disk 15 itself has passages 17, 35 in the radial direction and the passages are communicated with passages 18, 35 in the axial direction of the shaft 5.