Title:
真空ポンプ
Document Type and Number:
Japanese Patent JP7152073
Kind Code:
B2
Abstract:
In a vacuum pump (1), side plates (6, 7) defining both ends of a pump chamber (2) comprise plates having a divided structure, formed from first and second plates (20, 30). Heater installation slits (8, 9) are formed between the first and second plates (20, 30), and film heaters (10, 11) are fitted into the slits (8, 9), in surface contact with the first plate (20) on the pump chamber side. Since the side plates (6, 7) are heated directly from the inside by means of the film heaters (10, 11), the heating efficiency of wall parts inside the pump chamber can be efficiently increased, and adhesion and deposition of product can be efficiently suppressed.
Inventors:
Koki Iwashita
Kotaro Motegi
Kotaro Motegi
Application Number:
JP2021528538A
Publication Date:
October 12, 2022
Filing Date:
June 19, 2019
Export Citation:
Assignee:
Kashiyama Industry Co., Ltd.
International Classes:
F04C25/02; F04C29/04
Domestic Patent References:
| JP2007262906A | ||||
| JP2016118100A |
Attorney, Agent or Firm:
Shiro Yokozawa