Title:
VACUUM TREATMENT EQUIPMENT
Document Type and Number:
Japanese Patent JPH04276074
Kind Code:
A
Abstract:
PURPOSE: To prevent the generation of dust occurring at the time of gate valve opening relating to vacuum treatment equipment adopting a load lock system.
CONSTITUTION: The vacuum treatment equipment is constituted so that a by-pass mechanism 15 connecting a load lock chamber 1 and a vacuum chamber 2 is provided in the vacuum equipment where the load lock chamber 1 and the vacuum chamber 2 are provided in a manner to be in contact with each other via a gate valve 3.
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Inventors:
SANPEI MINORU
Application Number:
JP3820291A
Publication Date:
October 01, 1992
Filing Date:
March 05, 1991
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
C23C14/56; H01L21/203; H01L21/677; (IPC1-7): C23C14/56; H01L21/203
Attorney, Agent or Firm:
Sadaichi Igita