VERTICAL FURNACE - NIPPON STEEL CORP

Title:

VERTICAL FURNACE

Document Type and Number:

Japanese Patent JPH0653144

Kind Code:

A

Abstract:

PURPOSE: To surely fix a raw gas introduction tube parallel to a central axis of a container.

CONSTITUTION: A lower end supporting member 23 is formed which supports a lower end part of a vertical part 22a of a raw gas introduction tube 22. A hole part 18a is provided to a base plate 18 and a tubular support guide 36 is provided to an upper side of the hole part 18a. An upper end part of the vertical part 22a of the raw gas introduction tube 22 is supported by a support ring and a lower end supporting member 23 which is provided to a lower end part of the vertical part 22a is fit to the hole part 18a through the support guide 36 and is supported on the base plate 18. The hole part 18a is formed so that a straight line B passing through a center of the hole part 18a and a center of the support ring is completely parallel to a central axis A of a wafer boat 16.

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Inventors:

KAWASAKI ATSUSHI

Application Number:

JP22509292A

Publication Date:

February 25, 1994

Filing Date:

July 31, 1992

Export Citation:

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Assignee:

NIPPON STEEL CORP

International Classes:

H01L21/205; H01L21/22; (IPC1-7): H01L21/205

Attorney, Agent or Firm:

Masao Handa

Next Patent: 散薬供給装置