VIBRATION CONTROLLER, VIBRATION CONTROLLING METHOD, EXPOSURE SYSTEM AND MANUFACTURING METHOD OF DEVICE

Title:

VIBRATION CONTROLLER, VIBRATION CONTROLLING METHOD, EXPOSURE SYSTEM AND MANUFACTURING METHOD OF DEVICE

Document Type and Number:

Japanese Patent JP3919560

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To compose a high position control system even against a controlled object with low rigidity.
SOLUTION: A measuring apparatus 2 is provided for measuring elastic vibration of the controlled object 1, a driving part 3 is provided for applying force to the controlled object, and a compensator 4 is provided for determining the force to be generated by the driving part. Of a position composition, a velocity composition and an acceleration composition of the elastic vibration, the measuring apparatus measures at least the position composition. The compensator suppresses the elastic vibration of the controlled object on the basis of position information measured by the measuring apparatus.

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Inventors:

Koji Ito

Application Number:

JP2002050285A

Publication Date:

May 30, 2007

Filing Date:

February 26, 2002

Export Citation:

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Assignee:

Canon Inc

International Classes:

G03F7/20; G05D19/02; F16F15/02; F16F15/03; H01L21/027; H01L21/68; (IPC1-7): G05D19/02; F16F15/02; G03F7/20; H01L21/027; H01L21/68

Domestic Patent References:

JP10287127A
JP10287275A
JP9277992A
JP2001102286A
JP10311365A
JP10309951A
JP3014799A
JP11194066A

Attorney, Agent or Firm:

Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura

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