Title:
VIBRATION ELEMENT, ANGULAR VELOCITY SENSOR, ELECTRONIC DEVICE, AND MOVING BODY
Document Type and Number:
Japanese Patent JP2015105856
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a vibration element capable of reducing the wiring space of a piezoelectric element for downsizing.SOLUTION: The vibration element has support arms extending in directions opposite to each other from a base and vibration arms interesting the extension directions of the support arms and extending in directions opposite to each other, one of the vibration arms having a first piezoelectric substance and a second piezoelectric substance, the other of the vibration arms having a third piezoelectric substance and a fourth piezoelectric substance, the first and second piezoelectric substances and the third and fourth piezoelectric substances being provided with a lower electrode, a piezoelectric layer, and an upper electrode, with wiring for electrically connecting the upper and lower electrodes of the first and third piezoelectric substances and wiring for electrically connecting the upper and lower electrodes of the second and fourth piezoelectric substances provided.
Inventors:
II TOSHIHIRO
FUNEKAWA TAKEO
FUNEKAWA TAKEO
Application Number:
JP2013247383A
Publication Date:
June 08, 2015
Filing Date:
November 29, 2013
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G01C19/5607; H01L41/047; H01L41/113
Attorney, Agent or Firm:
Masahiko Ueyanagi
Kazuaki Watanabe
Kazuaki Watanabe
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