除振台装置 - Fujikura Rubber Industry Co., Ltd.

Title:

除振台装置

Document Type and Number:

Japanese Patent JP4080854

Kind Code:

B2

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Inventors:

Uminuma Masakuni
Toshikazu Aoki
Keiji Tamaki
Tomomasa Fujita
Hiroshi Kinda
Akihiro Hayashi
Mitsuaki Nakanishi

Application Number:

JP2002350635A

Publication Date:

April 23, 2008

Filing Date:

December 03, 2002

Export Citation:

Assignee:

Fujikura Rubber Industry Co., Ltd.

International Classes:

F16F15/04; G03F7/20; F16F9/04; F16F9/05; F16F15/02; F16F15/023; H01L21/027

Domestic Patent References:

JP2002070947A

Attorney, Agent or Firm:

Hideo Sarada
Junzo Yoneda

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