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Title:
VIBRATION PIECE, VIBRATOR, ELECTRONIC DEVICE, ELECTRONIC APPARATUS, AND MOBILE BODY
Document Type and Number:
Japanese Patent JP2014017388
Kind Code:
A
Abstract:

To realize a vibration piece whose frequency can be adjusted at high accuracy.

A vibration piece 1 comprises: a first vibration arm 17 and a second vibration arm 18; a first base 13 connecting each one end of the first vibration arm 17 and the second vibration arm 18; a second base 14 connecting the other ends; and weight membranes 41-44 provided on each of the first vibration arm 17 and the second vibration arm 18. Drive electrodes 20a-20c and drive electrodes 30a-30c are arranged at a position at which distortion generated on the first vibration arm 17 and the second vibration arm 18 is largest, and the weight membranes 41-44 are arranged at a position at which distortion generated on the first vibration arm 17 and the second vibration arm 18 is small. By removing one part of the weight membranes 41-44, a vibration frequency of the vibration piece 1 can be adjusted at high accuracy.


Inventors:
KIKUSHIMA MASAYUKI
Application Number:
JP2012154354A
Publication Date:
January 30, 2014
Filing Date:
July 10, 2012
Export Citation:
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Assignee:
SEIKO EPSON CORP
International Classes:
H01L41/09; H01L41/08; H01L41/18; H01L41/187; H03H9/02; H03H9/10; H03H9/19; H03H9/21; H03H9/215
Domestic Patent References:
JPH02189433A1990-07-25
JP2012065293A2012-03-29
JPS60501527A1985-09-12
JPS57155824A1982-09-27
JP2012044578A2012-03-01
JP2012074938A2012-04-12
JP2011102772A2011-05-26
Foreign References:
US5020370A1991-06-04
WO2012081457A12012-06-21
Attorney, Agent or Firm:
Masahiko Ueyanagi
Osamu Suzawa
Kazuhiko Miyasaka