Title:
ワーク固着用接着剤の除去装置
Document Type and Number:
Japanese Patent JP5430293
Kind Code:
B2
Inventors:
Noboru Katsumata
Application Number:
JP2009198003A
Publication Date:
February 26, 2014
Filing Date:
August 28, 2009
Export Citation:
Assignee:
Komatsu NTC Ltd.
International Classes:
H01L21/304; B24B27/06
Domestic Patent References:
| JP2001185513A | ||||
| JP11035892A | ||||
| JP4300255A |
Attorney, Agent or Firm:
Kunio Nakagawa
Takashi Nakagawa
Takashi Nakagawa