Title:
X-RAY DIFFRACTION APPARATUS FOR MEASURING LATTICE FLECTION
Document Type and Number:
Japanese Patent JPS6373104
Kind Code:
A
Abstract:
PURPOSE:To precisely measure a two-dimensional entire image of lattice flection in a short time by a method wherein a sample is turned within a plane and around the vertical axis and moved horizontally while a diffraction X-ray counter is moved vertically. CONSTITUTION:A sample 1 is subjected to X-ray diffraction, and a rotational angle thetaaround the vertical axis which satisfies the conditions of diffraction is determined according to a peak judging program of a control unit 12, so as to set the sample 1. Next, a diffraction X-ray counter 10 is moved a little vertically along an arm 5 formed integrally with a horizontal rotation stage 4, so as to determine an angle thetasatisfying the conditions of the diffraction. The same measurement is conducted with the sample 1 moved horizontally through the intermediary of a horizontal movement stage 3, so as to determine an angle theta, and these angle theta are written in a memory of the control unit 1. The same operation is conducted with the sample 1 turned at an angle of 90 deg. within a plane by rotating a holder 2, and thus a binary value of lattice flection of each point on the whole surface of the sample 1 is obtained. This value is subjected to a composition process, and thus a two-dimensional image of the lattice flection is measured precisely in a short time by the control unit 12 without re-mounting of the sample and the like.
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Inventors:
TSUCHIYA NORIHIKO
Application Number:
JP21843786A
Publication Date:
April 02, 1988
Filing Date:
September 17, 1986
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
H01L21/66; G01B15/00; G01B15/08; G01N23/20; (IPC1-7): G01B15/00; H01L21/66
Attorney, Agent or Firm:
Takehiko Suzue