PURPOSE: To enable efficient analysis without limit to an adaptive sample by performing an analysis with a background corrected by a single scanning of a sample surface.

CONSTITUTION: A sampled stage 1 is driven two-dimensionally in two directions of x and Y with x-way and y-way drivers 2x and 2y. X-ray photoelectrons of a sample surface are accelerated or decelerated properly with an electron accelerating lens system 4 laced between a sample S and a slit 3s on the electron incident side of an energy analyzer 3 and an image thereof is formed on a surface of the slit 3. A plurality of electron detectors 51, 52 and 53 are arranged in such a direction that an energy spectrum is dispersed with the analyzer 3 and one thereof is placed at a point A corresponding to a peak P and hence, adjacent electron detectors measure a background intensity. Thus, by subtracting an output 1b or Ic of the electron detector at an adjacent point B or C from an output 1a of the electron detector placed at the point A, a true peak height H is determined.