PURPOSE: To increase the reflectivity of X-rays, to widen the range of use wavelengths and to improve environmental resistance as well by alternately laminating magnesium oxide and metallic layers on a substrate.
CONSTITUTION: The magnesium oxide layer 2 is formed by a vacuum deposition method, molecular ray epitaxy method, sputtering method, ion beam method, etc., on the substrate 1 consisting of glass, silicon, graphite, etc. and further, the metallic layer 3 consisting of metals such as Mo, Ru, Rh, Pd, Ag, Hf, Ta, W, Re, Os, Ir, Pt and Au is formed thereon to make one set of a layer pair 4 consisting of the magnesium oxide layer 2 and the metallic layer 3. Such layer pairs are laminated by as much as the predetermined number by the same procedure. The wavelength range of the X-rays which can be used is thereby widened to 1W200 and since the layers have no restraint of crystallinity, the control of an improvement in the reflectivity are possible. This mirror is also usable where energy is high, since the environmental resistance is improved.
SATO TADASHI
SUZUKI HIROYUKI
NAKAJIMA KUNIO
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