Title:
両面研磨装置用キャリア及びこれを用いた両面研磨装置並びに両面研磨方法
Document Type and Number:
Japanese Patent JP5212041
Kind Code:
B2
Inventors:
Kazuya Sato
Junichi Ueno
Shuichi Kobayashi
Hideo Kudo
Junichi Ueno
Shuichi Kobayashi
Hideo Kudo
Application Number:
JP2008295527A
Publication Date:
June 19, 2013
Filing Date:
November 19, 2008
Export Citation:
Assignee:
Shin-Etsu Semiconductor Co., Ltd.
International Classes:
B24B37/28; B24B37/27; H01L21/304
Domestic Patent References:
| JP57157453U | ||||
| JP2000210863A | ||||
| JP11019866A | ||||
| JP11090801A | ||||
| JP6155286A | ||||
| JP2001138221A | ||||
| JP2004122346A | ||||
| JP2000288921A |
Attorney, Agent or Firm:
Mikio Yoshimiya