Title:
A chromatic aberration amendment device and an electron microscope
Document Type and Number:
Japanese Patent JP6054730
Kind Code:
B2
Abstract:
The chromatic aberration corrector (100) has a first multipole element (110) for producing a first electromagnetic field and a second multipole element (120) for producing a second electromagnetic field. The first multipole element (110) first, second, and third portions (110a, 110b, 110c) arranged along an optical axis (OA) having a thickness and producing a quadrupole field in which an electric quadrupole field and a magnetic quadrupole field are superimposed. In the first and third portions (110a, 110c), the electric quadrupole field is set stronger than the magnetic quadrupole field. In the second portion (110b), the magnetic quadrupole field is set stronger than the electric quadrupole field. The second portion (110b) produces a two-fold astigmatism component that is opposite in sign to two-fold astigmatism components produced by the first portion (110a) and third portion (110c).
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Inventors:
Sawada Hidetaka
Fumio Hosokawa
Fumio Hosokawa
Application Number:
JP2012270069A
Publication Date:
December 27, 2016
Filing Date:
December 11, 2012
Export Citation:
Assignee:
JEOL Ltd.
International Classes:
H01J37/153
Domestic Patent References:
| JP2010114068A |
Attorney, Agent or Firm:
Yukio Fuse
Mitsue Obuchi
Mitsue Obuchi