Title:
クリーニング装置
Document Type and Number:
Japanese Patent JP7433967
Kind Code:
B2
Abstract:
To provide a technology that is advantageous for improving cleaning performance.SOLUTION: A cleaning device cleans a discharge part having discharge ports formed on a discharge port surface to discharge a liquid and includes: an injection port which injects a gas toward the discharge port surface while translating relative to the discharge port surface; a first suction port which is provided at a position facing the injection port with respect to a translating direction and suctions the liquid separated from the discharge port surface with air; and a second suction port which is provided below the discharge ports and suctions the liquid separated from the discharge port surface with air.SELECTED DRAWING: Figure 2
Inventors:
Hiroyuki Kondo
Yuki Morita
Yuki Morita
Application Number:
JP2020023662A
Publication Date:
February 20, 2024
Filing Date:
February 14, 2020
Export Citation:
Assignee:
Canon Inc
International Classes:
B08B5/00; B05C5/00; B05C11/10; B41J2/165; H01L21/027
Domestic Patent References:
| JP2004174845A | ||||
| JP2000190514A | ||||
| JP2001030514A | ||||
| JP2014168896A |
Attorney, Agent or Firm:
Patent Attorney Corporation Otsuka International Patent Office
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