A defective detection system and a method which use all the original picture images

Title:

A defective detection system and a method which use all the original picture images

Document Type and Number:

Japanese Patent JP6100246

Kind Code:

B2

Abstract:

An apparatus for identifying a defect in an electronic circuit having periodic features, the apparatus including at least a camera for obtaining an image of the electronic circuit and an image processing system. The image processing system receives the image of the electronic circuit from the camera, performs a diagonal shift of the received image of the electronic circuit by at least a diagonal size of the periodic features of the electronic circuit to produce a shifted image of the electronic circuit, identifies a candidate defect using the image of the electronic circuit and the shifted image of the electronic circuit, computes one or more local defect-free reference (golden) images of the electronic circuit using at least one selected area in the closest proximity of the identified candidate defect and determines the defect in the electronic circuit using one or more computed local golden images of the electronic circuit, the image of the electronic circuit.

Inventors:

Nikolai Mokichev

Application Number:

JP2014514541A

Publication Date:

March 22, 2017

Filing Date:

June 05, 2012

Export Citation:

Click for automatic bibliography generation Help