Title:
電子顕微鏡
Document Type and Number:
Japanese Patent JP7126960
Kind Code:
B2
Abstract:
To provide an electron microscope capable of accurately matching an incidence angle of an electron beam to a specimen with a crystal azimuth of the specimen.SOLUTION: In an electron microscope, a control section performs processing for causing a specimen tilt mechanism to successively change a tilt angle of a specimen and acquiring multiple first electronic diffraction graphics obtained at mutually different tilt angles, processing for searching a first electronic diffraction graphic having the most diffraction spots from among the multiple first electronic diffraction graphics and calculating a first tilt angle that is a tilt angle at which the first electronic diffraction graphic having the most diffraction spots is obtained, processing for causing the specimen tilt mechanism to successively change the tilt angle of the specimen within an angle range including the first tilt angle, and acquiring multiple second electronic diffraction graphics obtained at mutually different tilt angles, processing for mutually circularly approximating the multiple second electronic diffraction graphics and calculating a second tilt angle at which a radius of the circle becomes minimum, and processing for causing the specimen tilt mechanism to change the tilt angle of the specimen into the second tilt angle.SELECTED DRAWING: Figure 7
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Inventors:
Hitoshi Sakurai
Nishikawa Masashi
Nishikawa Masashi
Application Number:
JP2019007758A
Publication Date:
August 29, 2022
Filing Date:
January 21, 2019
Export Citation:
Assignee:
JEOL Ltd.
International Classes:
H01J37/22; H01J37/20
Domestic Patent References:
| JP2010212067A |
Foreign References:
| US20170309441 | ||||
| WO2016006375A1 |
Attorney, Agent or Firm:
Fuse Yukio
Michie Obuchi
Michie Obuchi
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