Title:
ELECTRONIC COMPONENT CONVEYANCE DEVICE AND ELECTRONIC COMPONENT INSPECTION DEVICE
Document Type and Number:
Japanese Patent JP2017173075
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an electronic component conveyance device and an electronic component inspection device which can increase the work efficiency in maintenance while ensuring the safety of a worker.SOLUTION: An electronic component conveyance device 100 includes: a conveyance part 6 capable of conveying an electronic component (IC device 90); a cooling unit capable of cooling an electronic component cooled by a refrigerant and conveyed; and a switching unit 860 capable of switching between a first room, in which a temperature adjusting unit 12 as a cooling unit is arranged, and a refrigerant discharge destination.SELECTED DRAWING: Figure 2
Inventors:
KAMIMURA TATSUNORI
Application Number:
JP2016058115A
Publication Date:
September 28, 2017
Filing Date:
March 23, 2016
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G01R31/26
Attorney, Agent or Firm:
Kazuaki Watanabe
Keisuke Nishida
Satoshi Nakai
Keisuke Nishida
Satoshi Nakai